| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring method that dispenses with a large shift of a long sample by introducing a small shift of a sensor and can reduce two scan measurements before and after the shift of the sensor to one scan measurement when two sensors can be used.SOLUTION: An attitude sensor measures the difference in the attitude angle (pitching) in the scan moving direction of a sample to be measured during relative scan between both ends of the full length of the moving direction. On the basis of the output value and the outputs of first to third displacement sensors, the attitude change during the scan of the sample to be measured is corrected, and the straight shape of the sample to be measured is determined. Therefore, a large shift of the sample to be measured is not required, and accurate measurement can be achieved with a compact measuring apparatus. |
