| 摘要 |
<p>To improve throughput, a substrate transfer apparatus according to an embodiment of the present invention includes a substrate transfer apparatus, a substrate detector and a control device. The substrate transfer apparatus transfers substrates between the same and cassettes capable of accommodating multiple substrates. The substrate detector detects the substrates accommodated in a cassette. The control device controls the substrate transfer apparatus. The control device has a computation unit, a verification unit and a transfer control unit. The computation unit calculates the shifted amount between a preset base point and the position of a substrate detected by the substrate detector by setting the amount as positive when a substrate is shifted upward or downward from the base point. The verification unit verifies whether the difference between the maximum and minimum values among the shifted amounts calculated by the computation unit is equal to or less the threshold value. When the difference between the maximum and minimum values is verified to be equal to or less the threshold value by the verification unit, the transfer control unit controls the substrate transfer apparatus to unload substrates from the cassette.</p> |
