| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor having detection characteristics or output characteristics fitted to pressing feeling of a person when the person presses the pressure sensor.SOLUTION: A dielectric layer 33 is formed on the upper surface of a fixed electrode 32. A recess 33a is formed on the surface of the dielectric layer 33. An upper substrate 35a is laminated on the surface of the dielectric layer 33 so as to cover the recess 33a. A thin film type conductive diaphragm 35 is arranged above the recess 33a. In an area of the dielectric layer 33 opposing the diaphragm 35, the abundance ratio of the dielectric layer on a circumference centering around the center of the opposing area is varied according to the distance from the center of the opposing area. |
