TILT MODE ACCELEROMETER WITH IMPROVED OFFSET AND NOISE PERFORMANCE

摘要

PROBLEM TO BE SOLVED: To provide a tilt mode type MEMS accelerometer.SOLUTION: A single-axis tilt-mode microelectromechanical accelerometer structure for measuring an acceleration along a single axis includes: a substrate which has a top surface defining a plane substantially perpendicular to the single axis and has a first end and a second end; a first asymmetrically-shaped mass which is suspended above the substrate and is pivotable about a first pivot axis located between the first end and the second end; a second asymmetrically-shaped mass which is suspended above the substrate and is pivotable about a second pivot axis located between the first end and the second end; a first set of electrodes located on the substrate and below the first asymmetrically-shaped mass; and a second set of electrodes located on the substrate and below the second asymmetrically-shaped mass.