| 摘要 |
PROBLEM TO BE SOLVED: To produce, with high productivity, a template for nanoimprint having a conductive layer on a plurality of surfaces including a convexoconcave pattern formation surface having a convexoconcave pattern to be transferred.SOLUTION: A method of producing a template for nanoimprint includes the steps of: preparing a first substrate which is formed with a first convexoconcave pattern to serve as a template; and forming a conductive layer by the atomic layer deposition method so as to cover the first substrate, and, with the template produced in such a manner as a first template, a template for nanoimprint is produced by using the first template. The method includes the steps of: preparing a substrate for formation of the template; forming a first conductive layer so as to cover the substrate for formation of the template; and manufacturing a second substrate formed with a second convexoconcave pattern by imprinting on the substrate for formation of the template by using the first template. |
