SPECTRUM DISPERSION MEMS SELF-TESTING SYSTEM AND METHOD

摘要

PROBLEM TO BE SOLVED: To provide a MEMS sensor that has a spectrum dispersion modulation self-testing capability.SOLUTION: A MEMS sensor comprises: a detection circuit 106 that is configured so as to detect a stimulant generated by a microelectromechanical system 102 in a sensor band width of a device output signal; and a self-test circuit 112 that generates a test output signal 130 indicative of a status of the microelectromechanical system 102 by injecting a self-test signal 114 in a signal route of the microelectromechanical system 102 including a MEMS structure having something to do with a generation of the stimulant in the sensor band width of the device output signal. The self-test signal 114 is a spectrum dispersion signal that has a test signal band width overlapped with at least one part of the sensor band width.