| 摘要 |
PROBLEM TO BE SOLVED: To provide a PVD treatment device that can secure a sufficient work space and make a power supply cable as short in length as possible.SOLUTION: A PVD treatment device 1 includes: a housing type vacuum chamber 2 provided with doors 6, 7 on mutually opposite side faces rotatably by hinge parts 8a, 8b respectively; electrodes 4 provided for the doors 6, 7 respectively; and a power supply part 3 which is arranged outside side faces of the vacuum chamber 2 where the doors 6, 7 are not provided and supplies electric power to the electrodes 4, power supply cables 5 extending from the power supply part 3 being extended from respective hinge part sides of the doors 6, 7 to the electrodes 4 so as to supply electric power. A hinge part which pivotally supports one of the doors 6, 7, provided on the opposite side faces respectively, rotatably on a vertical axis and a hinge part which pivotally supports the other door rotatably on a vertical axis are arranged at different positions in a vertical projection on a plane parallel with the doors 6, 7. |
