| 摘要 |
PROBLEM TO BE SOLVED: To provide a uniform capacitance transducer fabricated by a sacrifice layer type, achieving a vibrating membrane with a small spring constance, acquiring further wide-band frequency characteristics and having little variation.SOLUTION: The capacitance transducer includes a cell 11 having a first electrode, and a vibrating membrane including a second electrode provided facing the first electrode via a cavity. Thickness of a part that is located at a periphery of a part 12 formed by sealing an etching opening 210 for use in sacrifice-layer etching for forming the cavity and that is connected to the vibrating membrane is smaller than thickness formed by subtracting the thickness of the second electrode from the thickness of membranes 206, 209, and 211. |
