| 摘要 |
PROBLEM TO BE SOLVED: To enable detection of a pressure fluctuation to be performed with sufficient accuracy, to enable a detectable lower limit frequency to be reduced, and to detect a pressure fluctuation of a low frequency band with high sensitivity.SOLUTION: A pressure sensor 1 forms a cavity 10 in the inside thereof, and includes: a hollow sensor body 3 having a communication opening port 11 for communicating between the cavity 10 and the outside; a cantilever 4 whose tip end part 4b is arranged so as to block the communication opening port 11 in a state that a free end and a base end 4a at the same time is supported by the sensor body 3 at a cantilever state and bent and deformed according to a pressure different between the cavity 10 and the outside of the sensor body 3; a displacement detection part 5 for detecting a displacement according to a bending deformation of the cantilever 4; and a pressure control part 6 for controlling a pressure of the cavity 10 so as to reduce a pressure difference or to suppress the bending deformation. |
