| 摘要 |
PROBLEM TO BE SOLVED: To provide an acoustic sensor capable of improving sensitivity while downsizing sensor size.SOLUTION: A vertically penetrated chamber 23 is opened on a silicon substrate 22. A diaphragm 24 is arranged on an upper surface of the substrate 22 so as to cover an upper surface aperture of the chamber 23. Leg pieces 26 are formed on corner sections of the diaphragm 24 on the inside of the diaphragm 24. The leg pieces 26 are separated from the diaphragm 24 by slits 25 and the leg pieces 26 are extended in diagonal directions of the diaphragm 24. The leg pieces are combined to the diaphragm 24 on outer peripheral side ends of the diaphragm 24 and center side ends of the diaphragm 24 are supported by anchors 27 arranged on the upper surface of the substrate 22. A back plate 28 is arranged above the substrate 22 so as to cover the diaphragm 24 and a fixed electrode plate 29 is arranged on a lower surface of the back plate 28 so as to face the diaphragm 24. |
