| 摘要 |
PROBLEM TO BE SOLVED: To further improve characteristics of an acoustic transducer of which the environmental resistance is improved by piercing through-holes into a diaphragm.SOLUTION: A silicon substrate has a vertically penetrated chamber. A diaphragm 23 is formed on an upper surface of the silicon substrate so as to cover an upper surface of the chamber. A back plate 28 is formed above the silicon substrate so as to cover the diaphragm 23 and a fixed electrode plate 29 is formed on a lower surface of the back plate 28 so as to face the diaphragm 23. A plurality of vertically penetrated acoustic holes 31 for passing acoustic vibration are pieced on the back plate 28 and the fixed electrode plate 29. A plurality of through-holes 27 with an aperture area smaller than the acoustic hole 31 are formed in an area with large displacement of the diaphragm 23. |
