SOLAR CELL MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a solar cell manufacturing apparatus, although in a simple configuration, capable of obtaining sufficient explosion-proof and dust collection properties when removing dust from a dust-containing gas generated in a vacuum film deposition device or scribing device.SOLUTION: A wet-process dust collector 3 comprises: a first dust collection chamber 11; a second dust collection chamber 21; a mist separator 31; a blower 41; a dust collection piping 12 for blowing out a dust-containing gas generated in a vacuum film deposition device 1 or a scribing device 2 into a dust collecting solution pooled in the first dust collection chamber 11; a connection piping 22 for sucking a gas above the liquid level of the dust collecting solution in the first dust collection chamber 11 and blowing out the sucked gas into a dust collecting solution pooled in the second dust collection chamber 21; a connection piping 32 for sucking a gas above the liquid level of the dust collecting solution in the second dust collection chamber 21 and sending the sucked gas to the mist separator 31; and a connection piping 42 for sending the gas in the mist separator 31 to the blower 41.