CHAMBER FOR EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

摘要

PROBLEM TO BE SOLVED: To facilitate operations of a chamber for extreme ultraviolet light generation apparatus and extreme ultraviolet light generation apparatus.SOLUTION: The chamber for extreme ultraviolet light generation apparatus in which droplets are serially output may include an imaging section that repeatedly images droplets in an imaging time in which images of the output neighboring two droplets are not overlapped.