| 摘要 |
The present invention relates to a micro motor using a magnetic vortex structure and a nano-ring magnetic thin film. The present invention comprises: a first magnetic thin film which is formed in a ring shape and has a spin alignment of an onion structure including fixed two walls; and a second magnetic thin film which is disposed inside the first magnetic thin film and formed with a magnetic vortex. According to the structure, the present invention can be produced in the size of ultrafine and also can produce the motor capable of rotating at high speed. Therefore, the present invention can be widely used in various small precision machinery fields such as a semiconductor chip and a drug delivery device. |
