OPTICAL WAVEGUIDE STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide an optical waveguide structure including an optical modulation part constituted of a rib type optical waveguide, capable of suppressing electric interference without causing optical loss and degradation of wavelength characteristics.SOLUTION: An optical waveguide structure includes an isolation region 107 surrounding an optical modulation part 111 and formed continuously to a core 104 and a slab layer 103 in a belt-shape. The isolation region 107 includes a p type inner part 171 arranged inside and an n type outer part 172 arranged in contact with the inner part 171 and outside the inner part 171. The inner part 171 and the outer part 172 are also formed in the core 104.