PHASE-CHANGE MEMORY AND SEMICONDUCTOR RECORD PLAYBACK SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide: a superlattice phase-change memory which enables the achievement of low power consumption; and a semiconductor record playback system.SOLUTION: A phase-change memory comprises a SnTe/SbTesuperlattice film produced by laminating a SnTefilm and an SbTefilm. The SnTe/SbTesuperlattice film includes: a SnTe/SbTesuperlattice phase including SnTe and SbTe; a SnSbTe alloy phase; and a Te phase. The SnTe/SbTesuperlattice phase is diluted by the SnSbTe alloy phase and the Te phase. In this state, X of the SnTefilm satisfies the following condition: 4≤X≤55 atom%.