发明名称 PASTE SUPPLY UNIT
摘要 <p>PROBLEM TO BE SOLVED: To provide a paste supply unit having high stability in the supply amount of paste.SOLUTION: A paste supply unit includes a saucer for holding paste, a drive unit for rotating the saucer, and a squeegee coming into contact with the surface of the paste. Recesses are formed in the lower surface of the squeegee in contact with the paste, and in the front surface which the paste approaches as the saucer rotates. The recess does not reach the opposite ends of the squeegee in the width direction along which the border line of the lower surface and front surface extends. The region of the inner surface of the recess, excepting the boundary region of the inner surface of the recess and the lower surface, is constituted of a continuous curved surface that is convex toward the outside of the recess.</p>
申请公布号 JP2014175555(A) 申请公布日期 2014.09.22
申请号 JP20130048525 申请日期 2013.03.11
申请人 TOSHIBA CORP 发明人 IMAI HIROYA
分类号 H01L21/52;B05C1/02;B05C11/04;H05K3/34 主分类号 H01L21/52
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