Methods and apparatuses for roll-on coating

摘要

Methods and apparatuses for a deposition system are provided to deposit a thin coating layer on flat substrates, such as semiconductors or panels. In an embodiment, liquid supplied rollers accepting liquid media provide liquid chemicals to the substrates for coating the substrates. The liquid delivery system can control the flow and the pressure of the liquid to achieve optimum process condition with minimum excess waste. In another embodiment, rollers with non-uniform distribution of liquid media provide a non-uniform thickness profile on the substrates, which can be used to compensate for the non-uniformity of subsequent processes.

主权项

1. A roller comprising:
an elongated rod, wherein the elongated rod is configured for accepting a fluid at an end of the elongated rod, wherein the elongated rod configured to transfer the fluid from the end of the rod to at least a first portion of an outer surface of the elongated rod; and a layer covering at least a second portion of the outer surface of the elongated rod for receiving the fluid at the outer surface of the elongated rod, wherein the elongated rod is operable to produce a coating layer on a substrate surface, wherein the coating layer is non-uniform in thickness in a direction along a length of the elongated rod.