发明名称 OPTICAL DEVICE
摘要 <p>An optical device comprises carbon nanotubes (111), in particular transversely arranged carbon nanotubes (111), for the purpose of enlarging its surface area. The carbon nanotubes (111) lead to a passive damping and, as a result, to the suppression of vibrations of the device, in particular under low-pressure conditions.</p>
申请公布号 WO2014140015(A1) 申请公布日期 2014.09.18
申请号 WO2014EP54706 申请日期 2014.03.11
申请人 CARL ZEISS SMT GMBH 发明人 SAROV, YANKO
分类号 G02B7/00;B82Y10/00;B82Y20/00;G02B7/02;G03F7/20 主分类号 G02B7/00
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