发明名称 PULSE LASER DEVICE
摘要 <p>A pulse laser device comprises: a laser source for outputting a pulse beam; a phase modulator for changing the phase of the pulse beam output from the laser source; a beam detector for detecting a pulse beam output from the laser source and outputting a detection signal that is a time-based waveform of a change in intensity; and a phase modulator driving power source for outputting a drive signal generating a phase change in proportion to the time-based waveform of the change in intensity on the basis of the detection signal output from the beam detector, and driving the phase modulator.</p>
申请公布号 WO2014141973(A1) 申请公布日期 2014.09.18
申请号 WO2014JP55663 申请日期 2014.03.05
申请人 NIKON CORPORATION 发明人 TOKUHISA, AKIRA;INABA, NAOTO
分类号 G02F1/01;G02F1/365;H01S3/10 主分类号 G02F1/01
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