发明名称 |
PULSE LASER DEVICE |
摘要 |
<p>A pulse laser device comprises: a laser source for outputting a pulse beam; a phase modulator for changing the phase of the pulse beam output from the laser source; a beam detector for detecting a pulse beam output from the laser source and outputting a detection signal that is a time-based waveform of a change in intensity; and a phase modulator driving power source for outputting a drive signal generating a phase change in proportion to the time-based waveform of the change in intensity on the basis of the detection signal output from the beam detector, and driving the phase modulator.</p> |
申请公布号 |
WO2014141973(A1) |
申请公布日期 |
2014.09.18 |
申请号 |
WO2014JP55663 |
申请日期 |
2014.03.05 |
申请人 |
NIKON CORPORATION |
发明人 |
TOKUHISA, AKIRA;INABA, NAOTO |
分类号 |
G02F1/01;G02F1/365;H01S3/10 |
主分类号 |
G02F1/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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