CERAMIC SHOWERHEAD WITH EMBEDDED RF ELECTRODE FOR CAPACITIVELY COUPLED PLASMA REACTOR

摘要

PROBLEM TO BE SOLVED: To provide a ceramic showerhead with an embedded RF electrode for a capacitively coupled plasma reactor that can avoid metal contamination, facilitates cleaning the inside, and has heat resistance.SOLUTION: A showerhead assembly 10 for a substrate processing system includes a back plate 20 connected to a gas channel 34. A face plate 30 is connected adjacent to a first surface of the back plate 20 and includes a gas diffusion surface. An electrode 50 is arranged in one of the back plate 20 and the face plate 30 and is connected to one or more conductors 54. A gas plenum 32 is defined between the back plate 20 and the face plate 30 and is in fluid communication with the gas channel 34. The back plate 20 and the face plate 30 are made of a non-metallic material, i.e. ceramic material(aluminium nitride, aluminium oxide, etc.)