| 发明名称 |
Resistor and Metal-Insulator-Metal Capacitor Structure and Method |
| 摘要 |
A passive circuit device incorporating a resistor and a capacitor and a method of forming the circuit device are disclosed. In an exemplary embodiment, the circuit device comprises a substrate and a passive device disposed on the substrate. The passive device includes a bottom plate disposed over the substrate, a top plate disposed over the bottom plate, a spacing dielectric disposed between the bottom plate and the top plate, a first contact and a second contact electrically coupled to the top plate, and a third contact electrically coupled to the bottom plate. The passive device is configured to provide a target capacitance and a first target resistance. The passive device may also include a second top plate disposed over the bottom plate and configured to provide a second target resistance, such that the second target resistance is different from the first target resistance. |
| 申请公布号 |
US2014264750(A1) |
申请公布日期 |
2014.09.18 |
| 申请号 |
US201313797315 |
申请日期 |
2013.03.12 |
| 申请人 |
Ltd. Taiwan Semiconductor Manufacturing Company |
发明人 |
Chang Chih-Fu;Wang Jen-Pan |
| 分类号 |
H01L27/06 |
主分类号 |
H01L27/06 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An integrated circuit device comprising:
a substrate; and a passive device disposed on the substrate, the passive device including:
a bottom plate disposed over the substrate;a top plate disposed over the bottom plate;a spacing dielectric disposed between the bottom plate and the top plate;a first contact and a second contact electrically coupled to the top plate; anda third contact electrically coupled to the bottom plate; wherein the passive device is configured to provide a target capacitance and a target resistance. |
| 地址 |
US |
