发明名称 |
CHEMICAL SENSOR WITH CONSISTENT SENSOR SURFACE AREAS |
摘要 |
In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A material defines an opening extending to the upper surface of the floating gate conductor, the material comprising a first dielectric underlying a second dielectric. A conductive element contacts the upper surface of the floating gate conductor and extending a distance along a sidewall of the opening. |
申请公布号 |
US2014264472(A1) |
申请公布日期 |
2014.09.18 |
申请号 |
US201414198417 |
申请日期 |
2014.03.05 |
申请人 |
LIFE TECHNOLOGIES CORPORATION |
发明人 |
FIFE Keith G.;OWENS Jordan;LI Shifeng;BUSTILLO James |
分类号 |
G01N27/414 |
主分类号 |
G01N27/414 |
代理机构 |
|
代理人 |
|
主权项 |
1. A chemical sensor comprising:
a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface; a material defining an opening extending to the upper surface of the floating gate conductor, the material comprising a first dielectric underlying a second dielectric; and a conductive element contacting the upper surface of the floating gate conductor and extending a distance along a sidewall of the opening. |
地址 |
Carlsbad CA US |