发明名称 CHEMICAL SENSOR WITH CONSISTENT SENSOR SURFACE AREAS
摘要 In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A material defines an opening extending to the upper surface of the floating gate conductor, the material comprising a first dielectric underlying a second dielectric. A conductive element contacts the upper surface of the floating gate conductor and extending a distance along a sidewall of the opening.
申请公布号 US2014264472(A1) 申请公布日期 2014.09.18
申请号 US201414198417 申请日期 2014.03.05
申请人 LIFE TECHNOLOGIES CORPORATION 发明人 FIFE Keith G.;OWENS Jordan;LI Shifeng;BUSTILLO James
分类号 G01N27/414 主分类号 G01N27/414
代理机构 代理人
主权项 1. A chemical sensor comprising: a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface; a material defining an opening extending to the upper surface of the floating gate conductor, the material comprising a first dielectric underlying a second dielectric; and a conductive element contacting the upper surface of the floating gate conductor and extending a distance along a sidewall of the opening.
地址 Carlsbad CA US