METHODS FOR FABRICATING GUIDE PATTERNS AND METHODS FOR FABRICATING INTEGRATED CIRCUITS USING SUCH GUIDE PATTERNS

摘要

Methods for fabricating guide patterns and methods for fabricating integrated circuits using guide patterns are provided. In an embodiment, a method for fabricating a guide pattern includes forming a coating of a material with latent grafting sites and a photosensitive component configured to activate the latent grafting sites upon exposure over a substrate. The method exposes selected latent grafting sites in the coating to convert the selected latent grafting sites to active grafting sites. A grafting agent is bonded to the active grafting sites to form the guide pattern.

主权项

1. A method for fabricating a guide pattern comprising:
forming a coating of a material including latent grafting sites and a photosensitive component configured to activate the latent grafting sites upon exposure over a substrate; exposing selected latent grafting sites in the coating to convert the selected latent grafting sites to active grafting sites; and bonding a grafting agent to the active grafting sites to form the guide pattern.