发明名称 STRUCTURE AND MANUFACTURING METHOD OF THE STRUCTURE, AND GALLIUM NITRIDE-BASED SEMICONDUCTOR LIGHT-EMITTING DEVICE USING THE STRUCTURE AND MANUFACTURING METHOD OF THE DEVICE
摘要 In a structure including a gallium nitride-based semiconductor having an m-plane as a principal plane, and a metal layer provided on the principal plane, the principal plane has an n-type conductivity. An interface between the gallium nitride-based semiconductor and the metal layer contains oxygen. The metal layer includes a crystal grain extending form a lower surface to an upper surface of the metal layer.
申请公布号 US2014264372(A1) 申请公布日期 2014.09.18
申请号 US201414290311 申请日期 2014.05.29
申请人 Panasonic Corporation 发明人 FUJIKANE Masaki;INOUE Akira;YOKOGAWA Toshiya
分类号 H01L29/20;H01L21/02;H01L33/32 主分类号 H01L29/20
代理机构 代理人
主权项 1. A structure, comprising: a gallium nitride-based semiconductor layer having an m-plane as a principal plane; and a silver layer provided on the principal plane, wherein the principal plane has an n-type conductivity, an interface between the gallium nitride-based semiconductor layer and the silver layer contains oxygen, and the silver layer includes a crystal grain extending from a lower surface to an upper surface of the silver layer.
地址 Osaka JP