发明名称 METHOD FOR CORRECTING AN ANGULAR DEVIATION IN THE OPERATION OF A COORDINATE MEASURING DEVICE
摘要 The invention relates to a method for correcting at least one angular deviation of a real angle from an ideal angle between motion axes (X, Y, Z) of a coordinate measuring device (211), wherein the angular deviation depends on position, temperature, and/or loading mass, comprising the following steps: a-1) determining values of the position-dependent angular deviation in such a way that i) at least one determined values is obtained for each of at least two partial measurement ranges (15, 20) of the coordinate measuring device, which partial measurement ranges form only part of a total measurement range (30) of the coordinate measuring device, wherein values of the position-dependent angular deviation determined for various partial measurement ranges of the coordinate measuring device differ, and/or ii) a determined value is obtained for at least one partial measurement range (15) and at least one value of the angular deviation is determined for a total measurement range (30) of the coordinate measuring device, wherein the at least one determined value for a partial measurement range of the coordinate measuring device can differ from the at least one value for the total measurement range, and b-1) correcting the position-dependent angular deviation in one or more partial measurement ranges (15, 20) of the coordinate measuring device for which at least one determined value of the position-dependent angular deviation was obtained, by using the at least one determined value, and/or a-2) determining values of the temperature-dependent angular deviation for at least two different temperatures in such a way that determined values of the temperature-dependent angular deviation in a temperature range are obtained and/or information for correcting the temperature-dependent angular deviation in a temperature range is obtained, b-2) correcting the temperature-dependent angular deviation by using one of the determined values and/or the obtained information from step a-2), and/or a-3) determining values of the loading-mass-dependent angular deviation for loading of the coordinate measuring device with at least two different loading masses (17, 18) in such a way that determined values of the loading-mass-dependent angular deviation in a range of loading masses are obtained and/or information for correcting the loading-mass-dependent angular deviation in a temperature range is obtained, and b-3) correcting the loading-mass-dependent angular deviation by using one of the determined values and/or the obtained information from step a-3).
申请公布号 WO2014140188(A1) 申请公布日期 2014.09.18
申请号 WO2014EP54978 申请日期 2014.03.13
申请人 CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH 发明人 FUCHS, ANDREAS;HELD, TOBIAS;SAGEMÜLLER, RAINER;SEITZ, DOMINIK
分类号 G01B21/04 主分类号 G01B21/04
代理机构 代理人
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