METHOD FOR PRODUCING HYDROGENATED CHLOROSILANE, AND CATALYST FOR USE IN PRODUCTION OF HYDROGENATED CHLOROSILANE

摘要

According to the present invention, it becomes possible to stably carry out a process of producing hydrogenated chlorosilane by the reduction of tetrachlorosilane in a hydrogen gas atmosphere. A catalyst for use in the reduction of tetrachlorosilane into hydrogenated chlorosilane according to the present invention is prepared by adding an iron component, a calcium component and a nickel component as reaction accelerators to metal silicon particles. The catalyst can keep the activity thereof even when a reaction for reducing tetrachlorosilane to produce hydrogenated chlorosilane takes a long period of time. Therefore, the process for producing hydrogenated chlorosilane can become more stable. In addition, even if the reaction accelerators are added to a system in the middle of the reduction reaction, the amounts of the reaction accelerators to be added can be reduced.