| 摘要 |
PROBLEM TO BE SOLVED: To obtain an MEMS element capable of suppressing a reduction in vibration efficiency by suppressing vibration leakage.SOLUTION: Provided is an MEMS element comprising: a substrate; and a resonator provided with a first conductive layer provided with a first fixed electrode and a second conductive layer provided with an upper electrode separate from the first fixed electrode, having an area overlapping the first fixed electrode in a normal direction view of a principal surface, and extending along the principal surface, and a support electrode for connecting a second fixed electrode connected to the principal surface and one end of the upper electrode and supporting the upper electrode. In this MEMS element, the upper electrode is provided with a plurality of drive electrodes divided by a slit-shaped notch formed in a direction from a vibration destination tip part to a vibration source part, the end of the upper electrode constituting the vibration source part and the other end constituting the vibration destination tip part. |
