发明名称 CURABLE COMPOSITION FOR IMPRINT, PATTERN FORMATION METHOD, AND PATTERN
摘要 <p>PROBLEM TO BE SOLVED: To provide: a curable composition for imprint by which even in thin film coating, a favorable pattern can be formed while causing less volatilization of components on a base material; a pattern formation method by use thereof; and a pattern obtained according to the method.SOLUTION: A curable composition for imprint comprises (A) at least one kind of polymerizable monomers, and (B) a photopolymerization initiator. In (A)the polymerizable monomers, the content of polymerizable monomers having a viscosity of 7 mPa s or larger at 25°C is 80 mass% or larger to all the polymerizable monomers.</p>
申请公布号 JP2014170949(A) 申请公布日期 2014.09.18
申请号 JP20140079890 申请日期 2014.04.09
申请人 FUJIFILM CORP 发明人 KODAMA KUNIHIKO
分类号 H01L21/027;B29C59/02;C08F2/00;C08F2/02;C08F2/06 主分类号 H01L21/027
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