| 摘要 |
PROBLEM TO BE SOLVED: To provide an actuator element capable of preventing interfacial peeling of an electrode film.SOLUTION: The actuator element includes: a piezoelectric material 209, a lower electrode 208 positioned at a lower part of the piezoelectric material 209, and an upper electrode 210 positioned at an upper part of the piezoelectric material 209, wherein the upper electrode 210 is coupled to a wiring 205 through a coupling hole 211, and the upper electrode 210 and the wiring 205 are formed of a same material. |
