发明名称 HETEROGENEOUS LAYERED STRUCTURE, METHOD OF PREPARING THE HETEROGENEOUS LAYERED STRUCTURE, AND ELECTRONIC DEVICE INCLUDING THE HETEROGENEOUS LAYERED STRUCTURE
摘要 A method of manufacturing a heterogeneous layered structure includes growing a hexagonal boron nitride sheet directly on a metal substrate in a chamber, increasing a temperature of the chamber to about 300° C. to about 1500° C., and forming a graphene sheet on the hexagonal boron nitride sheet by supplying a carbon source into the chamber while thermally treating the hexagonal boron nitride sheet at the increased temperature.
申请公布号 US2014264282(A1) 申请公布日期 2014.09.18
申请号 US201414211327 申请日期 2014.03.14
申请人 Samsung Electronics Co., Ltd. 发明人 LEE Sung-joo;SONG Young-jae;WANG Min;JANG Sung-kyu;CHOI Jae-young
分类号 H01L29/16;H01L21/02 主分类号 H01L29/16
代理机构 代理人
主权项 1. A heterogeneous layered structure comprising: a hexagonal boron nitride sheet; and a graphene sheet on the hexagonal boron nitride sheet, wherein the heterogeneous layered structure leads to a Dirac point shift of about 0 V to about 10 V in a plot of resistance (R) versus gate voltage (Vg) in an electronic device.
地址 Suwon-Si KR