发明名称 |
HETEROGENEOUS LAYERED STRUCTURE, METHOD OF PREPARING THE HETEROGENEOUS LAYERED STRUCTURE, AND ELECTRONIC DEVICE INCLUDING THE HETEROGENEOUS LAYERED STRUCTURE |
摘要 |
A method of manufacturing a heterogeneous layered structure includes growing a hexagonal boron nitride sheet directly on a metal substrate in a chamber, increasing a temperature of the chamber to about 300° C. to about 1500° C., and forming a graphene sheet on the hexagonal boron nitride sheet by supplying a carbon source into the chamber while thermally treating the hexagonal boron nitride sheet at the increased temperature. |
申请公布号 |
US2014264282(A1) |
申请公布日期 |
2014.09.18 |
申请号 |
US201414211327 |
申请日期 |
2014.03.14 |
申请人 |
Samsung Electronics Co., Ltd. |
发明人 |
LEE Sung-joo;SONG Young-jae;WANG Min;JANG Sung-kyu;CHOI Jae-young |
分类号 |
H01L29/16;H01L21/02 |
主分类号 |
H01L29/16 |
代理机构 |
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代理人 |
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主权项 |
1. A heterogeneous layered structure comprising:
a hexagonal boron nitride sheet; and a graphene sheet on the hexagonal boron nitride sheet, wherein the heterogeneous layered structure leads to a Dirac point shift of about 0 V to about 10 V in a plot of resistance (R) versus gate voltage (Vg) in an electronic device. |
地址 |
Suwon-Si KR |