发明名称 VACUUM EVAPORATING APPARATUS
摘要 A vacuum evaporating apparatus includes a driving unit, a linear-moving portion connected to the driving unit to move linearly, a rotational-moving portion connected to the linear-moving portion to move rotationally, and a shutter portion connected to the rotational-moving portion to pivot.
申请公布号 US2014264120(A1) 申请公布日期 2014.09.18
申请号 US201314020218 申请日期 2013.09.06
申请人 Samsung Display Co., Ltd. 发明人 LEE Young-Uk;HAN Jeong-Won
分类号 C23C16/448 主分类号 C23C16/448
代理机构 代理人
主权项 1. A vacuum evaporating apparatus, comprising: a driving unit; a linear-moving portion connected to the driving unit to move linearly; a rotational-moving portion connected to the linear-moving portion to move rotationally; and a shutter portion connected to the rotational-moving portion to pivot.
地址 Gyeonggi-do KR