MEMS SHUTTER ASSEMBLIES FOR HIGH-RESOLUTION DISPLAYS

摘要

This disclosure provides systems, methods and apparatus for providing compact shutter assemblies. Shutter assemblies can be formed in a more compact fashion, allowing for higher pixel-per-inch displays, by incorporating shutters that during actuation pass over or under portions of the actuators that control those shutters.

主权项

1. An apparatus, comprising:
a substrate; and an electromechanical systems (EMS) display element supported over the substrate, the EMS display element including:
an electrostatic actuator including:
a first beam electrode coupled to a first anchor;a second beam electrode, opposing the first beam electrode across an actuation gap and coupled to a second anchor,wherein, the first and second anchors support the first and second beam electrodes over the substrate such that at least one of the first and second beam electrodes deforms towards the other of the first and second beam electrodes in response to the application of a voltage across the actuation gap; and a shutter connected to the second beam electrode, such that upon actuation of the electrostatic actuator, an edge of the shutter closest to the second anchor passes over or under at least a portion of one of the first and second beam electrodes.