PIEZOELECTRIC THIN FILM ELEMENT, INKJET RECORDING HEAD, AND INKJET IMAGE-FORMING APPARATUS

摘要

A piezoelectric thin film element includes a substrate, a vibration plate provided on the substrate, a lower electrode provided on the vibration plate, the lower electrode including at least a platinum metal film or an iridium metal film, a piezoelectric film provided on the lower electrode, the piezoelectric film including a polycrystalline body, and an upper electrode provided on the piezoelectric film, the lower electrode being provided on an upper portion of a titanium oxide film formed on the vibration plate, the lower electrode including a platinum metal film or an iridium metal film formed on the titanium oxide film and conductive oxide formed on the platinum metal film or the iridium metal film, and the platinum metal film or the iridium metal film being a precise film.

主权项

1. A piezoelectric thin film element,comprising:
a substrate; a vibration plate provided on the substrate; a lower electrode provided on the vibration plate, the lower electrode including at least a platinum metal film or an iridium metal film; a piezoelectric film provided on the lower electrode, the piezoelectric film including a polycrystalline body; and an upper electrode provided on the piezoelectric film, the lower electrode being provided on an upper portion of a titanium film formed on the vibration plate, the lower electrode including a platinum metal film or an iridium metal film formed on the titanium oxide film and conductive oxide formed on the platinum metal film or the iridium metal film, and the platinum metal film or the iridium metal film being a precise film having a thickness of 150 nm or more and 250 nm or less and an average particle diameter of crystal of 250 nm without having a hole.