SEPARATION OF FUNCTION-BASED THIN-FILM DEPOSITION SYSTEMS AND METHOD FOR SYNTHESIS OF COMPLEX MATERIALS

摘要

A thin-film deposition system and method based on separating the function of multiple material sources by locating the sources in separate chambers partitioned by a partition wall, and providing a substrate conveyer, such as a rotating platform, to cyclically convey a substrate between the partitioned chambers so that the materials from the separated sources are serially introduced to the substrate per cycle in isolation of each other for layer-by-layer deposition and/or reaction on the substrate.

主权项

1. A thin-film deposition system comprising:
first and second chambers partitioned from each other by a partition wall; a first material source arranged to introduce a first material to a substrate as it passes through the first chamber; a second material source arranged to introduce a second material to a substrate as it passes through the second chamber; and a substrate conveyer adapted to cyclically convey a substrate between the first and second chambers so that the first and second materials are serially introduced to the substrate per cycle in isolation of each other for layer-by-layer deposition and/or reaction on the substrate.