| 摘要 |
Embodiments described herein relate to roomside replaceable fan filter units. In one embodiment, a roomside replaceable fan filter unit includes a housing having a filter receiving aperture and an air inlet, an aerosol injector, and a fan filter unit. The fan filter unit is coupled to the housing between the aerosol injector and the filter receiving aperture. In another embodiment, a roomside replaceable fan filter unit includes a housing having a sidewalls and a top wall that define an interior volume, an air inlet formed in the top wall, and a filter receiving aperture disposed opposite the top wall. The roomside replaceable fan filter unit also includes a fan filter unit disposed in the interior volume between the air inlet and the filter receiving aperture. The roomside replaceable fan filter unit includes an aerosol injector disposed upstream of the fan filter unit in the interior volume. |
