POSITION AND TEMPERATURE MONITORING OF ALD PLATEN SUSCEPTOR
摘要
<p>Apparatus and methods of measuring and controlling the gap between a susceptor assembly and a gas distribution assembly are described. Apparatus and methods for positional control and temperature control for wafer transfer purposes are also described.</p>
申请公布号
WO2014144533(A1)
申请公布日期
2014.09.18
申请号
WO2014US28988
申请日期
2014.03.14
申请人
APPLIED MATERIALS, INC.;RAVID, ABRAHAM;GRIFFIN, KEVIN;YUDOVSKY, JOSEPH;GANGAKHEDKAR, KAUSHAL;DZILNO, DMITRY A.;MINKOVICH, ALEX
发明人
RAVID, ABRAHAM;GRIFFIN, KEVIN;YUDOVSKY, JOSEPH;GANGAKHEDKAR, KAUSHAL;DZILNO, DMITRY A.;MINKOVICH, ALEX
