| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a vacuum pump in which all areas of the vacuum pump are effectively and sufficiently cooled so as to be effectively protected from an excessive temperature rise during operation, a device including the vacuum pump, and a method for operating the vacuum pump.SOLUTION: The present invention relates to a vacuum pump, particularly a turbo molecular pump, comprising: one pump inlet port 10; one pump outlet port 14; one pump chamber 18 arranged between the pump inlet port and the pump outlet port and provided for gas to be discharged; at least one cooling gas inlet port 48 provided for cooling gas for cooling the vacuum pump; and one or a plurality of hollow areas 50 connected to the cooling gas inlet port to allow ventilation, arranged outside the pump chamber, and provided for the cooling gas. The one or the plurality of hollow areas each are surrounded by at least one component to be cooled in the vacuum pump.</p> |
