ORIENTATION SUBSTRATE, PROCESS OF MANUFACTURING ORIENTATION FILM SUBSTRATE, SPUTTERING APPARATUS, AND MULTIPLE CHAMBER DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce cost of manufacture.SOLUTION: The orientation film substrate includes: an Si substrate 23 having a crystal plane of (100); an orientation film 31 of (100) formed by epitaxial growth on the Si substrate; and a conductive film 32, having magnetism, formed by epitaxial growth on the orientation film.