PERFORMING IMAGE CALCULATION BASED ON SPATIAL COHERENCE

摘要

Computer-implemented techniques for pixel source optics calculations using spatial coherence are disclosed. Pixelated sources are used for source-mask co-optimization to enhance semiconductor lithography. Calculation of a partially coherent imaging system is used for optical-lithography simulation. The spatial coherence property of neighboring source points is used to reduce imaging calculation complexity. Two or more neighboring points are treated as one pseudo-spatially coherent area element.

主权项

1. A computer-implemented method for image analysis comprising:
obtaining a set of source points for an image; determining that two or more points from the set of source points are neighboring source points; evaluating spatial coherence between the neighboring source points; and performing image calculation based on the spatial coherence.