INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS

摘要

A wavelength tunable interference filter includes a fixed substrate, a fixed reflection film that is provided on the fixed substrate, reflects part of incident light, and transmits at least part of the incident light, a movable reflection film that faces the fixed reflection film, reflects part of incident light, and transmits at least part of the incident light, and a fixed electrode that surrounds the fixed reflection film and has a light absorbing layer and a metal layer, and the light absorbing layer is disposed closer to the fixed substrate than the metal layer.

主权项

1. An interference filter comprising:
a substrate; a first reflection film provided on the substrate; a second reflection film facing the first reflection film; and a first electrode provided in an area surrounding the first reflection film, the first electrode having a light absorbing layer and a metal layer, wherein the light absorbing layer is disposed closer to the substrate than the metal layer.