发明名称 |
LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, PIEZOELECTRIC ELEMENT, ULTRASONIC TRANSDUCER, AND ULTRASONIC DEVICE |
摘要 |
A liquid ejecting head includes a passage-forming substrate provided with a pressure-generating chamber communicating with a nozzle orifice for ejecting a liquid and includes a piezoelectric element including a diaphragm disposed on the passage-forming substrate, a first electrode disposed on the diaphragm, a piezoelectric layer disposed on the first electrode, and second electrode disposed on the piezoelectric layer. The diaphragm includes a metal oxide layer of a metal oxide formed by a gas-phase method and a zirconium oxide layer of zirconium oxide formed by a liquid-phase method. |
申请公布号 |
US2014267508(A1) |
申请公布日期 |
2014.09.18 |
申请号 |
US201414173883 |
申请日期 |
2014.02.06 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
OHASHI Koji;YAZAKI Shiro;HIRAI Eiju |
分类号 |
B41J2/14;H01L41/08;H01L41/09 |
主分类号 |
B41J2/14 |
代理机构 |
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代理人 |
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主权项 |
1. A liquid ejecting head comprising:
a passage-forming substrate provided with a pressure-generating chamber communicating with a nozzle orifice for ejecting a liquid; and a piezoelectric element including a diaphragm disposed on the passage-forming substrate, a first electrode disposed on the diaphragm, a piezoelectric layer disposed on the first electrode, and a second electrode disposed on the piezoelectric layer, wherein the diaphragm includes a metal oxide layer of a metal oxide formed by a gas-phase method and a zirconium oxide layer of zirconium oxide formed by a liquid-phase method. |
地址 |
Tokyo JP |