发明名称 Wafer, Integrated Circuit Chip and Method for Manufacturing an Integrated Circuit Chip
摘要 A wafer has a number of IC areas and a kerf area arranged between the IC areas. The kerf area has a dicing area, a crack stop structure arranged between an IC area and a dicing area, and a trench arranged between the crack stop structure and the dicing area. The crack stop structure includes an extended layer extending beyond the crack stop structure towards the dicing area.
申请公布号 US2014264767(A1) 申请公布日期 2014.09.18
申请号 US201313829582 申请日期 2013.03.14
申请人 Infineon Technologies AG 发明人 Gratz Achim;Schindelar Thimo
分类号 H01L23/544;H01L21/78 主分类号 H01L23/544
代理机构 代理人
主权项 1. A wafer, comprising: a plurality of IC areas; and a kerf area arranged between the plurality of IC areas; wherein the kerf area comprises a dicing area, a crack stop structure arranged between an IC area and the dicing area, and a trench arranged between the crack stop structure and the dicing area; and wherein the crack stop structure includes an extended metal layer extending beyond the crack stop structure towards the dicing area.
地址 Neubiberg DE