发明名称 |
METHOD FOR PRODUCING FILM FORMATION MASK |
摘要 |
The present invention is a method for producing a film formation mask having such a structure that a metal mask sheet (4) having multiple opening patterns formed thereon is stretched and fixed onto a frame-like metal frame (7), said method comprising: a first step of adhering the peripheral part of the metal mask sheet (4) to a mesh (1) which is made from a synthetic fiber and to which a certain tensile force is applied; a second step of cutting and removing a portion of the mesh (1) which corresponds to a film formation effective area that has a size enough to cover the multiple opening patterns formed on the metal mask sheet (4); a third step of bonding and fixing the frame (7) to the peripheral part of the metal mask sheet (4) from the opposite side of the mesh (1); and a fourth step of removing the mesh (1) from the metal mask sheet (4). |
申请公布号 |
WO2014141816(A1) |
申请公布日期 |
2014.09.18 |
申请号 |
WO2014JP53614 |
申请日期 |
2014.02.17 |
申请人 |
V TECHNOLOGY CO., LTD. |
发明人 |
SAITO, YUJI;KUDO, SYUJI;KOSUGE,TAKAYUKI;MIZUMURA, MICHINOBU |
分类号 |
C23C14/04 |
主分类号 |
C23C14/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|