发明名称 METHOD FOR PRODUCING FILM FORMATION MASK
摘要 The present invention is a method for producing a film formation mask having such a structure that a metal mask sheet (4) having multiple opening patterns formed thereon is stretched and fixed onto a frame-like metal frame (7), said method comprising: a first step of adhering the peripheral part of the metal mask sheet (4) to a mesh (1) which is made from a synthetic fiber and to which a certain tensile force is applied; a second step of cutting and removing a portion of the mesh (1) which corresponds to a film formation effective area that has a size enough to cover the multiple opening patterns formed on the metal mask sheet (4); a third step of bonding and fixing the frame (7) to the peripheral part of the metal mask sheet (4) from the opposite side of the mesh (1); and a fourth step of removing the mesh (1) from the metal mask sheet (4).
申请公布号 WO2014141816(A1) 申请公布日期 2014.09.18
申请号 WO2014JP53614 申请日期 2014.02.17
申请人 V TECHNOLOGY CO., LTD. 发明人 SAITO, YUJI;KUDO, SYUJI;KOSUGE,TAKAYUKI;MIZUMURA, MICHINOBU
分类号 C23C14/04 主分类号 C23C14/04
代理机构 代理人
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