MULTI JUNCTIONS IN A SEMICONDUCTOR DEVICE FORMED BY DIFFERENT DEPOSITION TECHNIQUES

摘要

A semiconductor device, in particular a solar cell is formed on the basis of a hybrid deposition strategy using MOCVD and MBE in order to provide lattice matched semiconductor compounds. To this end, the MBE may be applied for providing a nitrogen-containing semiconductor compound that allows a desired low band gap energy and a lattice matched configuration with respect to gallium arsenide substrates.

主权项

1. A method of forming a plurality of pn junctions in a semiconductor device, the method comprising:
performing a chemical vapor deposition process and forming a first crystalline semiconductor layer comprising a first pn junction of the semiconductor device; and performing a molecular beam epitaxy process and forming a diluted nitrogen semiconductor material as a second crystalline semiconductor layer comprising a second pn junction of the semiconductor device.