| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump comprising rotors that allow the simplification of a production process by integrally forming the whole rotors by one material and allow the elimination of the risk of causing a clearance between a screw part and a shaft part because of thermal deformation during operation at a high temperature.SOLUTION: A vacuum pump comprises: a pair of rotors 2 arranged oppositely; a casing 1 that includes an inlet port and an outlet port and includes first bearings 3 for defining a distance between axes of the pair of rotors 2; and a motor part 10 that rotates the rotors 2. The rotors 2 are integrally formed by one material. |
