| 摘要 |
PROBLEM TO BE SOLVED: To allow various inspection object substrates to be inspected in a state of being held by a substrate holding part.SOLUTION: A substrate holding part 10 is configured to include a pair of holding pawl parts 11a and 11b and a movement mechanism 12 for moving the holding pawl part 11a toward the holding pawl part 11b and to be able to hold an inspection object substrate 100. Both the holding pawl parts 11a and 11b are configured so that the inspection object substrate 100 placed on a substrate placement part 21 can be held with both of contact parts 22a and 22b by moving the holding pawl part 11a toward the holding pawl part 11b by the movement mechanism 12. A plurality of insertion holes H and notches Ha allowing probing of respective probes to respective probing points defined in one surface of the inspection object substrate 100 held with both of the contact parts 22a and 22b are formed in a grid arrangement on the substrate placement part 21. |
