| 摘要 |
PROBLEM TO BE SOLVED: To provide an exposure device that prevents leakage of fluid filled in an optical path space of exposing light between an optical member and a substrate and that suppresses temperature change of the substrate and accurately exposes the substrate.SOLUTION: An exposure device comprises a gas seal mechanism (3) that generates an air current on a substrate (P) and seals fluid (LQ) filled in an optical path space of exposing light; and a compensation mechanism (5) that compensates temperature change of the substrate (P) resulting from the air current generated by the gas seal mechanism (3). |
