APPARATUS AND METHOD FOR THE REMOTE MONITORING, VIEWING AND CONTROL OF A SEMICONDUCTOR PROCESS TOOL

摘要

A precision pump system having a motor driver for accurately and repeatedly delivering process fluid, (e.g., photo chemicals) using a pumping fluid with minimal process fluid loss to a fabrication process and whereby the motor driver can be easily and quickly replaced without interrupting the fluid flow path. This is accomplished with the use of a process fluid reservoir and a pumping fluid reservoir that are associated with the pump, either integrated with the pump or closely adjacent. In addition, this precision pump system can be remotely monitored, viewed and controlled over the Internet. In addition, trapped process fluid within a downstream filtering block can be recirculated to the process fluid reservoir when trapped gas in the filter is removed. Furthermore, a nitrogen gas source is connected to the process fluid reservoir via a valve in case a need to insert a gas is required.

主权项

1. An apparatus for remotely monitoring and controlling the operation of a tool in a semiconductor manufacturing process over a network, said apparatus comprising:
at least one computer, remotely-located from said tool, in communication with said network, said computer comprising a web browser for communicating over said network; tool electronics that are in communication with said network; and a web server for establishing communication between said at least one computer and said tool electronics over said network when said at least one computer identifies said tool.