STABLE LITHIUM NIOBATE WAVEGUIDE DEVICES, AND METHODS OF MAKING AND USING SAME

摘要

Embodiments of the present invention provide stable lithium niobate waveguide devices, and methods of making and using the same. A lithium niobate-based waveguide device may include a Z-cut lithium niobate substrate having upper and lower surfaces, an optical waveguide embedded within the lithium niobate substrate, a signal electrode disposed on the upper surface of lithium niobate substrate and parallel to the optical waveguide, guard electrodes disposed on the upper surface of the lithium niobate substrate and flanking but spaced apart from the signal electrode, and a conductive layer on the lower surface of the lithium niobate substrate, wherein the conductive layer serves as a common ground reference for the signal and guard electrodes.

主权项

1. A waveguide device, comprising:
a Z-cut lithium niobate substrate having an upper surface and a lower surface; an optical waveguide embedded within the lithium niobate substrate; a signal electrode disposed on the upper surface of the lithium niobate substrate and parallel to the optical waveguide; a pair of guard electrodes disposed on the upper surface of the lithium niobate substrate and flanking the signal electrode; and a conductive layer disposed on the lower surface of the lithium niobate substrate and configured to provide a ground for the signal electrode and the guard electrodes.